Gas, Exhaust and Pump Line Insulated Silicone Heaters
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Durex Industries’ SENTINEL® heater and insulation systems offer a comprehensive thermal management solution for demanding vacuum applications, including PECVD, LPCVD, MOCVD, ALD, plasma etch, and more. These turnkey systems are engineered to maintain consistent temperatures in low vapor pressure gas delivery lines—preventing condensation and contamination that can compromise wafer processing yields.
In vacuum exhaust lines, vapor-phase by-products can cool and sublimate, forming deposits that reduce system efficiency and pose safety risks. SENTINEL® systems effectively heat fore lines, vacuum lines, and pumps to minimize the formation of ammonium chloride (AlCl₂), nitrides (NH₄, NH₄Cl), and other hazardous materials—enhancing process reliability and equipment longevity.
Prevent condensation, contamination, and hazardous buildup in critical gas delivery and exhaust lines with Durex SENTINEL® heater and insulation solutions.
Contact our engineering team today to configure a SENTINEL® solution tailored to your vacuum system requirements.
In vacuum exhaust lines, vapor-phase by-products can cool and sublimate, forming deposits that reduce system efficiency and pose safety risks. SENTINEL® systems effectively heat fore lines, vacuum lines, and pumps to minimize the formation of ammonium chloride (AlCl₂), nitrides (NH₄, NH₄Cl), and other hazardous materials—enhancing process reliability and equipment longevity.
Key Features & Benefits of Insulated Silicone Heaters
- Process Temperatures up to 180°C
- Maintains temperatures above condensation and sublimation thresholds for optimal process control.
- Extended Equipment Life
- Protects valves and vacuum pumps from corrosive buildup and thermal stress.
- Form-Fit Heater Construction
- Ensures uniform heating and reduces cold spots that can lead to particle accumulation.
- Structured Silicone Rubber Heaters
- Integrates heater designs for specific plumbing systems, reducing overall system cost and complexity.
- Optimized Temperature Uniformity
- Delivers precise thermal control for components requiring tight tolerances.SENTINEL® Gas and Pump Line Heaters (Patent Pending)
Optimize Thermal Management in Vacuum Applications with SENTINEL® Systems
Prevent condensation, contamination, and hazardous buildup in critical gas delivery and exhaust lines with Durex SENTINEL® heater and insulation solutions.Contact our engineering team today to configure a SENTINEL® solution tailored to your vacuum system requirements.