Cast Bake Platen Heaters
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Durex utilizes advanced heater technology to manufacture precision cast bake platen heaters for semiconductor processing of 200mm, 300mm, and 450mm wafers. Made from high-purity aluminum (99.7%), these cast-in platen heaters support operating temperatures up to 450°C (842°F) while minimizing the risk of process contamination.
The controlled casting process ensures a defect-free surface and body, eliminating porosity-related issues. A mineral-insulated heating element is embedded throughout the casting to deliver exceptional surface temperature uniformity—±1% or better of the process temperature. For added durability and electrical insulation, a hard-anodized finish is available, or the surface can be supplied with a 16 Ra μ-in (0.4 μm) finish.
Contact Durex Industries today to discuss your semiconductor heating requirements.