Cast Bake/Chill Pedestal Heaters
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Durex’s cast-in pedestal heaters are precision-engineered bake or chill platens designed for semiconductor processing. Each unit features an aluminum “neck” welded to the underside of the platen using electron beam welding—or friction welding when dissimilar materials are required—to ensure a robust, vacuum-tight assembly, verified through helium leak testing.
The working surface is precision-machined to a flatness tolerance of .0005" and can be customized with lift pin holes, proximity pins, and other features per application specifications. Integrated temperature sensors, such as RTDs or thermocouples, can also be included for accurate thermal control.
Contact Durex Industries today to discuss your semiconductor heating requirements.