Cast Vacuum Chamber Heaters
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Cast vacuum chamber heaters from Durex Industries are engineered to deliver optimal temperature profiles within vacuum chambers, enhancing process uniformity for improved etch and deposition rates. Consistent temperature control ensures superior results across semiconductor applications.
Key Features:
- Three-dimensional cast aluminum assemblies
- Operating temperatures up to 450°C (842°F)
- Available in aluminum alloys 170.1, 319, or 356
- Precision machining for vacuum and other custom features
- Integrated RTD or thermocouple sensors for accurate temperature monitoring
Contact Durex Industries today to discuss your semiconductor heating requirements.