Cast Hot Chuck Heaters
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Durex manufactures cast hot chuck heaters—also known as “heated tools”—for semiconductor processing, delivering precise and consistent heat to wafers throughout the manufacturing process. Each cast-in platen is custom-engineered with features such as vacuum channels on the working surface, tailored lift pin hole locations, and additional surface or backside mounting holes to meet specific application needs.
Constructed from high-purity aluminum (99.7%), these hot chucks offer exceptional temperature uniformity (±1% of process temperature) and maintain a flatness tolerance of .0005" across the surface. Choose from a hard coat anodized finish or a 16 Ra μ-in (0.4 μm) surface finish for optimal performance and durability.
Contact Durex Industries today to discuss your semiconductor heating requirements.