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SENTINEL Heater and Insulation Systems

Durex Industries' SENTINEL heater and insulation systems are a turnkey thermal solution for PECVD, LPCVD, MOCVD, ALD, plasma etch and other vacuum applications. Low vapor pressure gas delivery lines need to be held at a temperature higher than the gas vaporization point in order to prevent condensation that will affect process yields. Vacuum exhaust lines remove the vapor phase by-products from the semiconductor process. Sublimation occurs when the vapor phase materials cool in a vacuum line. By heating the forelines, vacuum lines, and vacuum pumps, sublimation of ammonium chloride (AlCl2), nitrides (NH4) (NH4Cl) and other potentially hazardous materials can be substantially reduced.
 

SENTINEL Features and Benefits

Process Temperature to 180°C

• Elevates gas temperature above vapor condensation or sublimation phase
• Extends life of valves and vacuum pumps

Form-Fit Heater Construction

• Reduces potential for particle build-up in cold sections
• Optimum process performance and tool up-time

Structured Silicone Rubber Heaters

• Reduces system cost by combining the heater constructions for a specific plumbing system
• Optimizes temperature uniformity for components that require tighter temperature tolerances
• Reduces thermal system complexity

SENTINEL Gas and Pump Line Heaters (patent pending)