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Ohm's Law – Single
Ohm's Law – Triple (Delta)
Ohm's Law – Triple (Wye)
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  • Polyimide Heaters
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  • Polyimide Heaters

    Polyimide Heaters and integrated Assemblies represent a thermal solution for application requiring precision temperature profiles at lower process temperatures. By supplying a thermal assembly that has been optimized for an application, Durex can assure that part-to-part performance will meet the semiconductor equipment specifications. Polyimide heater solutions are commonly used in wafer testing, dry etch, and other applications.

    • Process temperature 200°C (392°F)
    • Kapton® or silicone rubber materials
    • Moisture and chemical-resistant

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