Calculators
Ohm's Law – Single
Ohm's Law – Triple (Delta)
Ohm's Law – Triple (Wye)
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Wattage Requirements
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Home > Products > Semiconductor Processing > Aluminum Pedestal Heaters
  • Aluminum Pedestal Heaters
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  • Aluminum Pedestal Heaters

    Aluminum Pedestal Heaters are the material of choice for most deposition and etch applications, because aluminum has excellent thermal conductivity and is inert to many process chemicals such as HF.

    • Operating temperature < 450°C(842°F)
    • Aluminum alloys 170.1, 319 or 356
    • Perpendicularity < 0.1 mm
    • Surface flatness to 0.005 mm
    • Machined vacuum, lift pin, and other features
    • Welding of dissimilar materials
    • Integral cable and tubular heater assemblies
    • Anodized aluminum and other coatings

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