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  • Semiconductor Processing
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  • Semiconductor Processing

    Durex Industries is the semiconductor equipment industries premier supplier of high performance radiant, convection, and conduction thermal solutions. Equipment used in manufacturing processes for transistors, memory devices, and microprocessors all require precise thermal solutions. Knowing the importance of temperature, Durex continues to innovate and provide customer specific thermal solutions that are critical to the next generation equipment and processes.

    More Products In This Section

    • Aluminum Pedestal Heaters
      Aluminum Pedestal Heaters
      Aluminum Pedestal Heaters are the material of choice for most deposition and etch applications, because aluminum has excellent thermal conductivity and is inert to many process chemicals such as HF. Operating temperature < 450°C(842°F) Aluminum alloys 170.1, 319 or 356 Perpendicularity < 0.1 mm Surface flatness to 0.005 mm Machined…
    • Cast Vacuum Chamber Heaters
      Cast Vacuum Chamber Heaters
      Cast Vacuum Chamber Heaters are designed to optimize temperature profile in a vacuum chamber. Uniform process temperature improves etch and deposition rates and uniformity. Three dimensional cast aluminum assemblies Operating temperature < 450°C (842°F) Aluminum alloys 170.1, 319 or 356 Precision machining of vacuum and other features Integral RTD or…
    • Cast Aluminum Wafer Chucks
      Cast Aluminum Wafer Chucks
      Durex Cast Aluminum Wafer Chucks are an industry standard for wafer probing (test) applications maintaining temperature uniformity, perpendicularity, and flatness throughout the thermal profile. Achieving consistent and precision temperature uniformity is a direct result of Durex’s thermal modeling (FEA) design tools and propriety manufacturing processes.
    • Cable (Coil) Heaters
      Cable (Coil) Heaters
      Cable (Coil) Heaters are high temperature corrosion and oxidation resistant heaters that can be manufactured in small diameters and formed into geometries that optimize the thermal profile of a heated part. Operating temperature < 650°C (1200°F) 304, 316 stainless steel or Incoloy® Diameter < 0.40 inches (10.16 mm) Voltage to…
    • Aluminum Tubular Heaters
      Aluminum Tubular Heaters
      Aluminum Tubular Heaters are the preferred integral heater solution for many aluminum pedestal and heated part assemblies. Material compatibility between the heater and aluminum housing reduces potential for movement of the element due to thermal cycling. Standard Tubular Heater Assemblies are used in radiant heating applications and as integral conduction…
    • RTD or Thermocouple Sensors
      RTD or Thermocouple Sensors
      RTD or Thermocouple Sensor Assemblies used in semiconductor and PV processes require knowledge of thermodynamics and the application’s environment. Durex sensor assemblies are designed to be robust and provide the highest degree of accuracy and repeatability. Single or multipoint sensor assemblies NIST traceable calibration on refractory thermocouple materials 100, 1000,…
    • Polyimide Heaters
      Polyimide Heaters
      Polyimide Heaters and integrated Assemblies represent a thermal solution for application requiring precision temperature profiles at lower process temperatures. By supplying a thermal assembly that has been optimized for an application, Durex can assure that part-to-part performance will meet the semiconductor equipment specifications. Polyimide heater solutions are commonly used in…
    • 316L Immersion Heaters
      316L Immersion Heaters
      316L Immersion Heaters represent a high purity tubular heater technology use in cleaning steps for many PV cell applications.
    • Cartridge Heater Assemblies
      Cartridge Heater Assemblies
      Cartridge Heater Assemblies, because of their high watt density and small size, are the preferred solution for wire and die bonding applications. RTD and thermocouple sensors are integrated into the heater for process or limit control.  
    • Radiant Heating Panels
      Radiant Heating Panels
      Radiant Heating Panels are designed for thermal precision and robustness in large sizes for conveyor furnace, roll-to-roll (web) furnaces and single piece vacuum chambers. The cable (coil) or tubular heater layout is optimized for the equipment design and specified temperature profile. Dimensions< 2.5 sq meters (26.91 sq. ft.) Operating temperature…
    • Conduction Heating Panels
      Conduction Heating Panels
      Conduction Heating Panels are designed and manufactured in large dimensions using either cast aluminum heater technology or mill groove heater assemblies with top and bottom plate welded or mechanically fastened to insure heater placement. Cast aluminum dimensions to < 2.5 sq meters (26.91 sq. ft.) Stainless steel dimensions < 2.5…
    • E Series Control Consoles
      E Series Control Consoles
      Durex Industries' E-Series Temperature Control Consoles integrate temperature controllers, power switching devices, power connectors, fuses, sensor connectors and other electromechanical devices into a compact system. The integration of discrete components into a complete self-powered turnkey system saves design and manufacturing cost, while providing a robust reliable temperature control system for…

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