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  • Gas Delivery and Pump Line Heaters
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  • Gas Delivery and Pump Line Heaters

    Durex Industries' Gas and Pump Line heaters are turnkey thermal solutions used in PECVD, LPCVD, plasma etch and other vacuum applications. Low vapor pressure gas delivery lines need to be held at a temperature higher than the gas vaporization point in order to prevent condensation that will affect process yields. Vacuum exhaust lines remove the vapor phase bi-products from the semiconductor process. Sublimation occurs when the vapor phase materials cool in a vacuum line. By heating the forelines, vacuum lines, and vacuum pumps, sublimation of ammonium chloride (AICI2), nitrides (NH4) (NH4CI) and other potential hazardous materials can be substantially reduced.

    System and Process Safety
    • Reducing effluence buildup in lines decreases potential for exposure to hazardous materials during preventative maintenance (PM) cycles.
    • System components meet UL, CE, and SEMI S2 and other agency safety specifications.
    • Insulation system is designed to meet SEMI S2 surface temperature requirements.

    Features and Benefits
    Process Temperatures to 200°C
    • Elevates gas and vapor temperature above vapor condensation or sublimation phase.
    • Designed with clean room compatible silicone rubber and distributed wattage, a uniform temperature can be achieved.

    Product Overview

     

     

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      Ideal for straight, elbows, tees, and other less complex 3-D dimensions of the vacuum components. Formed silicone rubber heaters are a lower cost method of providing uniform heating. (Kapton® is a registered trademark of E.I. du Pont de Nemours and Company.)
    • Turnkey Temperature Control Consoles and Panels
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      Turnkey Temperature Control Consoles and Panels Accurate temperature control of the gas or pump line system requires precision temperature control and flexibility to future changes in process requirements.  Durex Industries electronic temperature controls provide temperature stability of <1.0°C with options for alarm functions, serial communications and many other control parameters.…

    Engineering Data

    Gas and Pump Line Heater Specifications and Options
    • Silicone rubber molded and fiber reinforced insulation and heater jacket
    • Integral fuse and thermostat options
    • Color: Standard orange, option gray
    • Snap fasteners: 13 mm (0.5 inch) nominal diameter
    • 120 or 240V - (ac)
    • Output power lead wires: #18 AWG UL® insulated wires, rated 10A
    • Watt density typically: 0.23 W/cm2 (1.5 W/in2)

    Product Applications

    • Gas Delivery Line Systems
    • Pump Line Systems

    Product Downloads

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