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Ohm's Law – Single
Ohm's Law – Triple (Delta)
Ohm's Law – Triple (Wye)
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Home > Products > Electric Heaters > Cast In Heaters > Cast In Heaters for Semiconductor Processing > Bake/Chill Pedestal Heaters
  • Bake/Chill Pedestal Heaters
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  • Bake/Chill Pedestal Heaters

    The cast-in pedestal heater for semiconductor processing is basically a bake or chill platen that has an aluminum “neck” attached to the underside of the platen by electron beam welding. A helium leak test is performed to insure a vacuum tight assembly. The surface of the cast-in pedestal is precision machined with a flatness tolerance of .0005” and typically includes lift pin holes and proximity pins per individual specifications. The cast-in pedestal heater can also include an integral temperature sensor as part of the assembly.

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