Cast In Heaters Semiconductor Processing 
The stringent requirements of the wafer processing industry demand precise heat uniformity and unmatched performance from a heating device.

Durex Industries manufactures a line of cast-in heaters and mineral insulated heaters to meet the challenges of these applications.

Manufactured under the most rigid quality standards, these heaters are designed to deliver the performance that the industry expects and demands. Durex engineering will customize any of our heater products to meet your specifications. Rapid prototyping is our specialty.






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Cast In Heaters Semiconductor Processing
Utilizing state of the art heater technology, Durex manufactures precision cast-in bake platen heaters specifically for semiconductor processing 200mm and 300mm wafers.

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The cast-in pedestal heater for semiconductor processing is basically a bake or chill platen that has an aluminum “neck” attached to the underside of the cast-in platen by electron beam welding.

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The cast-in bake/chill platen heater for semiconductor processing has essentially the same operating specifications as the cast-in bake platen with the addition of a cooling function.

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Durex manufactures cast-in hot chucks or “heated tools” for semiconductor processing that deliver precise heat to wafers during the manufacturing process.

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When temperatures exceed the 450°C-temperature range offered by aluminum platen heaters, Durex offers a unique high temperature platen heater to extend the range available for a machined heater.

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Mineral insulated cable heaters are designed as a high temperature heat source for specific areas or locations. The versatility of the design makes this heater a superior choice for semiconductor processing applications.

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Tubular heating elements used for semiconductor processing require specific manufacturing controls to insure performance criteria not available in conventional heating elements.

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The standard cast-in pedestal heater manufactured by Durex for semiconductor processing is designed to provide a quick solution for wafer processing applications.

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High Performance Thermal Solutions

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