Durex Industries is the semiconductor equipment industries premier supplier of high performance radiant, convection, and conduction thermal solutions.
Durex Industries introduced SENTINEL™ Molded Foam Silicone Rubber Heaters at Semicon West 2013.
Improved Thermal Efficiency, Higher Process Temperatures, and Reduced System Cost
Durex Industries developed this patent-pending advanced heater technology, because Semiconductor Equipment Industry engineers need thermal solutions that meet specifications for next generation manufacturing processes while reducing thermal system costs. SENTINEL™ Pump Line Heaters are available in standard I.D. size diameters of 1.5, 2.0, and 4.0 inch straight sections, elbows, tees, reducers, and flanges. The heaters can also be easily designed to the dimensions of valves, regulators, and other gas delivery and pump line components.
Structured Silicone Rubber Heater Assembly
SENTINEL™ heaters are also available using structured silicone rubber heater and extruded silicone insulation technology. Structured heater technology is used in many small (1/4 to 3/4) inch diameter gas delivery line applications and in complex low volume applications.
The equipment used in today's manufacturing processes for transistors, memory devices, and microprocessors require precise thermal solutions. Knowing the importance of temperature, Durex continues to innovate and provide customer specific thermal solutions that are critical to the next generation equipment and processes. Specifically, the processing of semiconductors requires deposition of materials to create semiconductor junctions, interconnection of layers, and etching of photoresist and line edges. Precisely controlling the temperature of the deposition and etch process is critical to the performance of the device and increasing yield.
Contact us to see how our proven technology platforms can be quickly customized to provide you with optimum performance in CVD, PECVD, LPCVD, plasma etch and other critical process equipment.
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