Gas Line and Abatement Heating Applications
The Challenge: A manufacturer of LEDs used elevated temperatures in an abatement system, which reduced sublimation of materials that resulted in reduced yield and increased preventive maintenance.
Our Solution: They used phosphorus in the deposition process when scheduling a preventive maintenance (PM) cleaning of the exhaust lines every six weeks. Since phosphorus is flammable, the fire prevention team was on site during every PM. We recommended they install pump line heaters from the vacuum chamber to the scrubber.
The Result: The manufacturer has substantially extended the time between PMs, saving costs and reducing the hazardous risk of fire.
For the precise solution to your thermal challenge, contact us today at 800-762-3468 or sales@durexindustries.com.
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