Thermal Products for Semiconductor Processing

Cary, IL – A fully integrated manufacturer, Durex offers design and application engineering, as well as prototyping, in-house foundry casting, machining, assembly and rigorous quality assurance procedures to support its products, used for all phases of wafer processing operations.

Products include: bake platens for 200 and 300mm wafers, bake/chill platens, bake/chill pedestals, hot chucks (heated tools), high-temperature platens (over 450ºC), pedestal heaters, mineral-insulated cable heaters, tubular heating elements, cartridge heaters, multi-point thermocouples/RTD’s, mineral-insulated thermocouples and platinum RTD’s.

Durex offers its full product range to OEM equipment builders and end users, operating in all phases of wafer processing, including CVD, photolithography, strippers, PVD, etching and probers. Durex brings over 20 years’ experience in semiconductor processing to serve all customer requirements.